2010
MAS 2010 Proceeding
Precision tracking motion control of an xy micropositioning stage driven by stepper motor
Authors: Hatem Tlijani, Mohamed Benrejeb
Abstract
This paper aims to present a motion coordination control approach for two axis XY stage system driven by PM stepper motors. The proposed coordinated control approach is based on a three tier composite control structure feed-forward, feedback PID and force disturbance observer. The contouring performance of a biaxial system is studied for circular trajectories and has been improved by using the proposed control scheme.To demonstrate the effectiveness of the control system design based on analysis of stage dynamics, typical results of system performance experiments micropositionning motion with high precision tracking and accurate positioning was obtained by simulations developed using Matlab and Simulink software.
I3M Scientific Sponsors
I3M Industrial Sponsors
I3M Media Sponsors
